| 摘要 |
A substrate buffering system is provided herein. In some embodiments, a substrate buffering system may include a frame having a vertical shaft disposed therethrough; two storage platforms, one each disposed on either side of the frame, each to receive a substrate carrier thereon; and a transfer mechanism coupled to the vertical shaft and capable of vertical movement along the vertical shaft and lateral movement sufficient to move the transfer mechanism over either of the two storage platforms. The transfer mechanism may further include a telescoping fork arm capable of laterally extending in a first direction and in a second direction corresponding to lateral positions of the two storage platforms on either side of the frame. In some embodiments, the substrate may be a wafer. In some embodiments, the substrate may be a semiconductor wafer. |
