Method and device for inspecting a surface of an optical component

摘要

The present invention provides an inspection system for inspecting a surface of an optical specimen. The inspection system includes an optical testing device having a main body and an optical axis. The optical testing device includes an optical imaging system housed in the main body. The optical imaging system includes imaging components for acquiring a microscope visual image and for acquiring at least one interference fringe image of the surface of the optical specimen. The optical testing device also includes a translational mechanism housed in the main body and configured to allow linear movement of the optical imaging system and to prevent off-axis movement of the optical imaging system.