| 摘要 |
PURPOSE: A coupling structure of a carrier holder and a wafer carrier are provided to prevent the deterioration of a wafer edge and wafer flatness by reducing an abrasion of a pin hole of the wafer carrier. CONSTITUTION: A combining structure of a wafer carrier and a carrier holder comprise a pin(12), and a pinhole(24), and an anti-wear member(70). The pin is formed in a carrier holder. The pinhole is formed in the wafer carrier so that the pin is inserted to the pin hole. The penetration hole into which the pin is inserted is formed. An anti-wear member is arranged on the circumference of the pinhole on the wafer carrier. The penetration hole and pinhole have the same diameter.
|
