发明名称 Two bit U-shaped memory structure and method of making the same
摘要 A memory structure includes: a substrate; a control gate positioned on the substrate; floating gates positioned at two sides of the control gate, wherein the floating gates have a U-shaped bottom embedded in the substrate; a first dielectric layer positioned between the control gate and the substrate; a second dielectric layer positioned between the U-shaped bottom of the floating gates and the substrate; a third dielectric layer positioned between the control gate and the floating gates; a local doping region positioned around the floating gates channel; and a source/drain doping region positioned in the substrate at a side of the floating gates.
申请公布号 US7667262(B2) 申请公布日期 2010.02.23
申请号 US20080139499 申请日期 2008.06.15
申请人 NANYA TECHNOLOGY CORP. 发明人 LIAO WEI-MING;WANG JER-CHYI
分类号 H01L29/788 主分类号 H01L29/788
代理机构 代理人
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