FABRICATION METHOD OF MICRO ELECTRO-MECHANICAL COMPONENT

摘要

PURPOSE: A fabrication method of micro electro-mechanical components is provided to omit a seed layer formation process by applying a plating process on a conductor substrate such as metal. CONSTITUTION: A conductor substrate(11) is composed of a substrate spread with metal itself and the conductive material like metal. A functional structure(12) performing an electromechanical is formed by processing the conductor substrate. The functional structure a functional unit(12a), a connection unit(12c) and 2 supporting unit(12b). A plating structures(14,15) are formed by using a plating method at the upper and lower parts of the functional structure.