PLASMA POLYMERIZED THIN FILM AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A plasma polymer thin film with low dielectric constant is provided to ensure thermal stability and excellent mechanical property and to reduce a complex process for pre- and post- processing generated in a spin casting method. CONSTITUTION: A plasma polymer thin film with low dielectric constant is prepared by a linear precursor material represented by chemical formula 1 and a linear precursor material represented by chemical formula 2. In chemical formula 1, R1-R6 are independently selected from the group consisting of a hydrogen atom and a substituted or unsubstituted C1-C5 alkyl group; X is oxygen atom or C1-C5 alkylene group.