发明名称 NOZZLE
摘要 PURPOSE: A nozzle is provided to suppress gas discharged from a sub discharging hole exposed through the gap of container and nozzle by varying the shape of a sub discharging hole. CONSTITUTION: The nozzle(100) comprises a main outlet(101), a sub outlet(102), a through-hole(103), a management(111) and an adjutant(112). The management comprises a main outlet. The gas of the fuzzy passes through the management. The Adjutant surrounds the management. A gap is formed between the management and adjutant. The adjutant is concentrically arranged with a through-hole.
申请公布号 KR20100019938(A) 申请公布日期 2010.02.19
申请号 KR20090008052 申请日期 2009.02.02
申请人 MURATA MACHINERY. LTD. 发明人 ADACHI NARUTO;TAKAI KANAME
分类号 H01L21/00 主分类号 H01L21/00
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