发明名称 Wafer container having the latch and inflatable seal element
摘要 A wafer container includes a container body that having an open front on sidewall, a plurality of slots disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, the characteristic in that: at least one latch is disposed in the door and an inflatable seal element is located at the rim of the inner side of the door.
申请公布号 US2010038283(A1) 申请公布日期 2010.02.18
申请号 US20080234650 申请日期 2008.09.20
申请人 CHIU MING-LONG;HUNG KUO-CHUN 发明人 CHIU MING-LONG;HUNG KUO-CHUN
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
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