| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently optimize measurement conditions of a search alignment mark. <P>SOLUTION: In measurement conditions of a search alignment mark, illumination conditions important for capturing an image signal of the mark are first optimized (step 106), search alignment measurement for detecting the search alignment mark is performed by an alignment detection system under the optimized illumination conditions (step 112), and measurement conditions other than the illumination conditions are optimized when an error occurs in the search alignment measurement (steps 114, 116), thus preventing measurement conditions other than the illumination conditions from being optimized unless an error occurs as a result of the search alignment measurement performed by the alignment detection system under the optimized illumination conditions, and hence efficiently optimizing the measurement conditions of the search alignment mark. <P>COPYRIGHT: (C)2010,JPO&INPIT |
