| 摘要 |
<P>PROBLEM TO BE SOLVED: To clearly present the present condition of backup data, and to reduce a load of a storage for storing the backup data in data backup using the presentation. <P>SOLUTION: In this substrate treatment system, a substrate treatment device and a centralized management device are connected to each other through a communication line. The substrate treatment device includes a transmission means to transmit device information related to the substrate treatment device to the centralized management device. The centralized management device includes: a reception means to receive the device information from the centralized management device; a storage means to store the device information and backup data of the device information; and a display means to classify the device information and the backup data of the device information by a predetermined unit to display the classified device information and the backup data in a tree form. <P>COPYRIGHT: (C)2010,JPO&INPIT |
