| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a firing setter dissolving such a problem that a crystal structure of a setter is changed from the conventional corundum crystal structure into a spinel crystal structure and, therefore, the warping of the setter or the peeling of surface layer occurs due to stress caused by such a change, based on a chemical reaction between a low-melting point metal oxide and a setter component upon firing of a workpiece containing the low-melting point metal oxide. <P>SOLUTION: The firing setter comprises a substrate 3 and a coat layer, wherein the coat layer is prepared to be the spinel crystal structure and, thereby, it is prevented that the crystal structure of the coat layer is changed upon firing of the workpiece. <P>COPYRIGHT: (C)2010,JPO&INPIT |
