| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately position the width direction of a substrate orthogonal to a carrying direction by a pusher even when the length of a substrate to be used in the carrying direction is short. Ž<P>SOLUTION: A first distance meter 42A and a second distance meter 42B for measuring a distance between a first pusher 40A and a second pusher 40B, and that between a fixed rail and a movable rail are provided to a substrate-positioning-fixing part 12. After the substrate is positioned in the carrying direction, driving the first pusher and the second pusher with the respective predetermined cylinder pressure is started to depress the movable rail 22A and the measurement by the first distance meter and the second distance meter is also started. When the measured values L1, L2 by at least one distance meter become the length corresponding to the width W of the substrate or below, the driving of the first pusher and the second pusher is stopped to adjust the cylinder pressure of the first pusher and the second pusher so as to eliminate the deviation of the measured value of both distance meters. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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