| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a monitoring method, monitoring program and monitoring system of a manufacturing process for knowing the occurrence of abnormal trend and its severity and a method for manufacturing a product. <P>SOLUTION: The monitoring method for monitoring a manufacturing process comprises: collecting data related with quality characteristics in a manufacturing process; extracting data as the object of detection from data related with the quality characteristics; carrying out frequency analysis to the data as the object of detection; monitoring the occurrence of abnormal trend based on the result of the frequency analysis and a predetermined critical value, and, when the occurrence of the abnormal trend is detected, determining the severity; specifying data related with the quality characteristics when the occurrence of the abnormal trend is detected and data related with the quality characteristics when the abnormal trend occurs; and outputting the data of the determination of the severity, the data related with the quality characteristics when the occurrence of the abnormal trend is detected and the data related with the quality characteristics when the occurrence of the abnormal trend occurs. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
