| 摘要 |
PROBLEM TO BE SOLVED: To prevent discharging port of liquid material from being blockaded by deposits. SOLUTION: The liquid material vaporizer in which the liquid material is discharged against a vaporizing chamber 360 to vaporize the same and produce material gas, includes a fine hole 316 to discharge the liquid material, reserved in a liquid reserving chamber 310, against the vaporizing chamber, a valve 334 for opening and closing the liquid entrance 312 at the liquid reserving chamber side of the fine hole, an actuator 330 for driving this valve and a projecting rod 340 fit loosely into the fine hole. In this case, the projecting rod is configured such that the base end thereof is attached to the valve thereby the tip end 344 of the projecting rod is cooperated with the motion of the valve so as to be projected from or immersed into a discharging port at the vaporizing chamber side of the fine hole. COPYRIGHT: (C)2010,JPO&INPIT
|
