| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a silicon single crystal, which prevents a heat insulating material from falling in a tubular member and can manufacture a silicon single crystal having a desired quality. Ž<P>SOLUTION: The apparatus for manufacturing a silicon single crystal is provided with: a crucible accommodating a silicon raw material; a heater for heating and melting the silicon raw material in the crucible; and a pulling means for pulling a silicon single crystal rod from a silicon melt in the crucible. Further, the apparatus has a cylindrical heat shielding body 23 surrounding the outer peripheral surface of the silicon single crystal rod. The heat shielding body 23 has an inner tubular member 27, an outer tubular member 28 arranged on the outer side of the tubular member 27, a heat insulating material 26 provided between the tubular members 27, 28, and a bottom plate member 29 for closing the opening at the bottom part side of a space between the tubular members 27, 28. In the heat shielding body 23, a support 31 is provided so as to support the heat insulating material 26 in such a state that the heat insulating material 26 is situated at a prescribed distance upward from the upper surface of the bottom plate member 29. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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