INDUCED RESONANCE COMB DRIVE SCANNER

摘要

Briefly, in accordance with one or more embodiments, a MEMS based scanning platform (114) is arranged to have increased efficiency by driving a first frame (116) of the scanning platform directly by applying a drive voltage to a set of comb fingers (214, 216) disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure (210) and by driving a second frame (212) of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.