| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive composition having excellent resistance to crack, patterning property, and heat resistance. <P>SOLUTION: This radiation-sensitive composition contains the following components (A) and (B): (A) denotes at least one selected from the group consisting of a hydrolytic silane compound expressed by the formula (1) (wherein, R<SP>1</SP>, R<SP>2</SP>, X, and A denote 1-12C alkyl group or the like, 2-30C alkylene group or the like allowed to have substituent group, a hydrolytic group, and a quadrivalent organic group, respectively, p and q are 0-2 integer and 1-3 integer being independent from each other, respectively, and p+q=3), a hydrolysate of the hydrolytic silane compound, and a condensation product of the hydrolysate; and (B) denotes photooxygen generator. <P>COPYRIGHT: (C)2010,JPO&INPIT |
