| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying container for a holding jig, which is excellent in housing efficiency and can eliminate the risk that the circumferential edge or the like of a wafer is damaged due to vibration in carrying. SOLUTION: The carrying container for removably fitting a holding jig 1 for fitting a lid 20 onto the surface of a container body 10 for supporting the holding jig 1 for a test wafer W, wherein the container body 10 includes a body 11 having a substantially groove-like cross section, a hollow circular truncated cone 13 formed like a recess on the body 11 and supporting the circumferential edge of the holding jig 1 on the upper end of a circumferential wall, and a plurality of stoppers 18 formed between the body 11 and the circumferential wall end of the circular truncated cone 13 and regulating the circumferential edge of the holding jig 1. The lid 20 includes: a body lid 21 overlapping on the surface of the body 11 of the container body 10 and having a substantially groove-like cross section; and a hollow circular truncated cone dome 23 formed like a recess on the body lid 21 and covering the circular truncated cone 13 of the container body 10 and the stoppers 18. COPYRIGHT: (C)2010,JPO&INPIT |
