| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface treatment method for a metallic material which can provide the surface of a metallic material with a film having sufficient corrosion resistance to a corrosive gas, and further, with a film having sufficient thickness capable of withstanding use as a substrate heating heater in a plasma CVD system for the metallic material. <P>SOLUTION: In the surface treatment method for a metallic material, magnesium oxide powder is dispersed into a fluorocarbon based compound-dispersed liquid, the surface of a metallic material is coated with the dispersed liquid, and thereafter, heating is performed in the air or in an oxygen atmosphere, thus a fluorinated passive film is formed on the surface of the metallic material. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
