发明名称 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 A memory string has a semiconductor layer with a joining portion that is formed to join a plurality of columnar portions extending in a vertical direction with respect to a substrate and lower ends of the plurality of columnar portions. First conductive layers are formed in a laminated fashion to surround side surfaces of the columnar portions and an electric charge storage layer, and function as control electrodes of memory cells. A second conductive layer is formed around the plurality of columnar portions via a gate insulation film, and functions as control electrodes of selection transistors. Bit lines are formed to be connected to the plurality of columnar portions, respectively, with a second direction orthogonal to a first direction taken as a longitudinal direction.
申请公布号 US2010038703(A1) 申请公布日期 2010.02.18
申请号 US20090501142 申请日期 2009.07.10
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 FUKUZUMI YOSHIAKI;KATSUMATA RYOTA;KITO MASARU;KIDOH MASARU;TANAKA HIROYASU;ISHIDUKI MEGUMI;KOMORI YOSUKE;AOCHI HIDEAKI
分类号 H01L29/792;H01L27/112 主分类号 H01L29/792
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