| 摘要 |
The present invention relates to a contactor for testing a semiconductor device, including an upper substrate, a middle substrate, and a lower substrate stacked into layers, wherein the upper substrate, the middle substrate, and the lower substrate are copper clad laminates (CCL) having a plurality of holes corresponding to ball leads of the semiconductor device, and each of the holes has an inner wall coated with a plating film containing a conductive metal. An insulating silicon layer is formed on both sides of the middle substrate. The lower substrate is made of a rigid copper clad laminate. Whereby, a contactor for testing a semiconductor device with improved durability, wear resistance, and abrasion resistance, and a prolonged lifespan, can be obtained. Specifically, as the material of the lower substrate is defined as a rigid copper clad laminate, the lower substrate may function as a reinforcing substrate for supporting the whole of the contactor. |
