| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To produce an excellent vibration prevention effect and an excellent protection effect, and reduce the generation of particles. <P>SOLUTION: A carrier case for a reticle pod includes a top cover, a bottom cover and a buffer positioning device disposed in the storing space of the bottom cover. The buffer positioning device includes a carrier structural part and a plurality of elastic parts. The carrier structural part is constituted of a bottom part and a plurality of blade parts which are connected with the bottom part and are curved and extended in a vertical direction. A plurality of the elastic parts are connected with the bottom part and are curved in the other opposite vertical direction so as to form a plurality of the elastic parts including curved portions. A plurality of the curved portions of the elastic parts are formed in the same plane. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
