| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically delete part of backup data. Ž<P>SOLUTION: In the substrate processing system, a substrate processing device and a central management device are connected through a communication line. The substrate processing device has a transmitting means for transmitting device information associated with the substrate processing device to the central management device. The central management device which has: a receiving means for receiving the device information from the substrate processing device; a first storage means for storing the device information and backup data of the device information; a second storage means for storing a maximum value in a data area of the first storage means; and a deleting means for deleting part of the backup data stored in the first storage means according to the state of the data area of the first storage means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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