END FACE GRINDING DEVICE OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a grinding device for grinding an end face of a brittle substrate such as a glass substrate. SOLUTION: The end face grinding device includes a grinding wheel of which the peripheral edge part for grinding the end face of the substrate is made by elastic material, and a rotation driving means and feed control means of the grinding wheel. The rotation driving means has a load current detection means for detecting load current flowing while abutting to the end face of the substrate and a validity determination means of the load current value, The feed control means has a notch direction feed control means and a thrust direction feed control means to the end face of the substrate, and notch direction feed operation and thrust direction feed operation of the grinding wheel are controlled based on the validity determination means of the load current value. COPYRIGHT: (C)2010,JPO&INPIT