Method for archiving of data, involves transferring and processing archived data into raster beam system, and inputting processed data into raster beam system

摘要

The method involves transferring and processing the archived data into a raster beam system. The processed data is inputted into the raster beam system. The data information is transferred with the aid of the raster beam system to a substrate surface under modification of the surface topography of a substrate (10). The raster beam system comprises an electron-beam, an ion beam or X-ray system, and an extreme ultraviolet beam source. An independent claim is included for a device for archiving of data with a data reading unit.