发明名称 PATTERNING METHOD TO CREATE A MASK
摘要 <p>A method of creating micro patterned devices by patterning thin films which are deposited on a substrate. A channel or channels is created on the substrate, the width being of fine enough resolution such that a flowable mask material can be drawn along the channel by capillary forces.</p>
申请公布号 WO2010019184(A1) 申请公布日期 2010.02.18
申请号 WO2009US04216 申请日期 2009.07.21
申请人 RIDER, CHRISTOPHER BARRIE;EASTMAN KODAK COMPANY;BOWER, CHRISTOPHER LEE 发明人 RIDER, CHRISTOPHER BARRIE;BOWER, CHRISTOPHER LEE
分类号 H01L21/027;H01L21/3213 主分类号 H01L21/027
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