| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of supplying air at a flow rate and flow velocity required for air conditioning without increasing a size of an air conditioning mechanism. <P>SOLUTION: The exposure device including an exposure body to expose a substrate has a chamber for storing the exposure body and an air conditioning mechanism for air conditioning the inside of the chamber. The air conditioning mechanism has a pipe for running compressed air to be supplied in an object area inside the chamber and a blowing out section connected to the pipe. The blowing out section includes: an air outlet which has a smaller cross-sectional area than that of the pipe and blows out the air sent through the pipe; and a guiding face which attracts the air blown out of the air outlet and runs the air along the surface of the guiding face so that the air is run in the direction different to the blow-out direction of the air outlet and is guided in the object area. <P>COPYRIGHT: (C)2010,JPO&INPIT |
