| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve analysis accuracy of element analysis by laser-induced breakdown spectroscopy by suppressing influence of a surface contaminant on a measuring object surface or molecules in a measuring atmosphere. Ž<P>SOLUTION: This element analyzer for analyzing an element concentration included in a sample 16 has a laser light oscillation device 1 for generating pulse laser light 3 generating plasma light 21 when being irradiated to the sample 16, and an analysis head 51. The analysis head 51 has a laser light transmission part 52 for transmitting the pulse laser light 3, a laser light condensing part 10 for condensing the pulse laser light 3 onto an irradiation surface 16a of the sample 16, and a laser light irradiation part 15 for irradiating the irradiation surface 16a with the pulse laser light 3. Airtightness keeping means 17, 18 are arranged between the distal end of the laser light irradiation part 15 and the sample 16, while keeping airtightness. A buffer gas supply port 19 for supplying buffer gas for replacing the atmosphere in the laser light irradiation part 15 and a buffer gas discharge port 20 for discharging the buffer gas are arranged on the side of the laser light irradiation part 15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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