发明名称 |
Error Diffusion-Derived Sub-Resolutional Grayscale Reticle |
摘要 |
A method is provided for forming an error diffusion-derived sub-resolutional grayscale reticle. The method forms at least one partial-light transmissive layer overlying a transparent substrate. At least one unit cell in formed in the transmissive layer. The unit cell is formed by selecting the number of reduced-transmission pixels in the unit cell, and forming a sub-pattern of reduced-transmission pixels in the unit cell. The unit cell is sub-resolutional at a first wavelength.
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申请公布号 |
US2010040959(A1) |
申请公布日期 |
2010.02.18 |
申请号 |
US20080247130 |
申请日期 |
2008.10.07 |
申请人 |
ULRICH BRUCE D;ONO YOSHI;GAO WEI |
发明人 |
ULRICH BRUCE D.;ONO YOSHI;GAO WEI |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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