QUALITY CONTROL METHOD AND MICRO/NANO-CHANNELED DEVICES
摘要
Embodiments of the present invention comprise a quality control system and method for testing micro- or nano-channeled devices. The system and method can utilize a pressure- driven gas flow for the detection and quantification of structural defects. The test method and system are non-destructive and allow defects to be detected and classified quickly based on measured factors, such as mass flow rate for a given pressure differential.
申请公布号
WO2009134786(A3)
申请公布日期
2010.02.18
申请号
WO2009US41957
申请日期
2009.04.28
申请人
THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM;GRATTONI, ALESSANDRO;FERRARI, MAURO;LIU, XUEWU