发明名称 FUSE IN SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A fuse of a semiconductor device and a method for manufacturing the same are provided to prevent damage for the fuse and an electrical short-circuit by forming the fuse with a multilayer structure performing repair process. CONSTITUTION: A second conductive pattern(202) is formed on the top of a first conductive pattern(201) and is spaced apart with a preset-gap to the first conductive pattern. The second conductive pattern includes an overlap part(202A) which is overlapped to the end of the first conductive pattern. An air gap is formed between the overlap part and the first conductive pattern. An insulating layer(206) includes an open area exposing the top of the first conductive pattern. A line-width of the overlap part is identical to or wider than a line-width of the first conductive pattern. The overlap part includes support film expanded below the overlap part.
申请公布号 KR20100018815(A) 申请公布日期 2010.02.18
申请号 KR20080077492 申请日期 2008.08.07
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, JEONG SOO
分类号 H01L23/62 主分类号 H01L23/62
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