| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crystallinity evaluating device of a silicon membrane capable of enhancing the evaluation probability of the crystallinity of the silicone membrane, and a crystallinity evaluating method. Ž<P>SOLUTION: The crystallinity evaluating device of a silicon membrane includes a light source 54, an insulator 52 having transparent conductive films 52a and 52b formed on its surface, the measuring terminal 56 directly attached to the transparent conductive film 52a, and a holder 50 for integrally housing the light source 54, the transparent insulator 52 and the transparent conductive films 52a and 52b in arrangement such that the light output from the light source 54 is transmitted through the insulator 52 to irradiate the surface of a sample. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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