| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement measuring device for assembling and adjusting an optical system easily, and suppressing decline of a light quantity when a foreign matter or the like adheres onto a scale part. SOLUTION: This optical displacement measuring device 1A includes a reflection optical system 16 for irradiating two one-time diffracted lights Lb1, Lb2 diffracted by a diffraction grating 11T of the scale part 11A, again to the diffraction grating 11T. The reflection optical system 16 includes micro corner cube prism collection mirrors 17a, 17b formed by arraying longitudinally and laterally each micro corner cube prism constituted of a prism having the shape of a triangular pyramid having a vertex formed by combining three right angles. COPYRIGHT: (C)2010,JPO&INPIT
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