摘要 |
PROBLEM TO BE SOLVED: To easily produce optical resonance in an optical measuring instrument for a microresonator device. SOLUTION: The optical measuring instrument for the microresonator device is equipped with a sample stage 141 on which the microresonator device 10 is installed, an irradiation optical system (a beam expander 122 and a movable mirror) 123 for guiding measuring light Lo to the microresonator device 10, an angle adjusting means (movable mirror) 123 for adjusting an irradiation angle when the microresonator device 10 is irradiated with the measuring light Lo, a photodetector 132 for detecting the signal light produced from a measuring target substance on the microresonator device 10 by irradiating the microresonator device 10 with the measuring light Lo and the reflected light by the microresonator device 10, a detection optical system 131a for guiding the signal light and the reflected light to the photodetector 132 and a feedback control part 124 for performing the feedback control of the angle adjusting means 123 so that the intensity of the reflected light may become minimum and used for measuring the measuring target substance on the basis of the signal light. COPYRIGHT: (C)2010,JPO&INPIT
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