发明名称 STRUCTURE, DESIGN STRUCTURE AND METHOD OF MANUFACTURING DUAL METAL GATE VT ROLL-UP STRUCTURE
摘要 A structure, design structure and method of manufacturing is provided for a dual metal gate Vt roll-up structure, e.g., multi-work function metal gate. The method of manufacturing the multi-work function metal gate structure comprises forming a first type of metal with a first work function in a central region and forming a second type of metal with a second work function in at least one edge region adjacent the central region. The first work-function is different from the second work function.
申请公布号 US2010041225(A1) 申请公布日期 2010.02.18
申请号 US20080192491 申请日期 2008.08.15
申请人 ANDERSON BRENT A;NOWAK EDWARD J 发明人 ANDERSON BRENT A.;NOWAK EDWARD J.
分类号 H01L21/4763 主分类号 H01L21/4763
代理机构 代理人
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