发明名称 |
STRUCTURE, DESIGN STRUCTURE AND METHOD OF MANUFACTURING DUAL METAL GATE VT ROLL-UP STRUCTURE |
摘要 |
A structure, design structure and method of manufacturing is provided for a dual metal gate Vt roll-up structure, e.g., multi-work function metal gate. The method of manufacturing the multi-work function metal gate structure comprises forming a first type of metal with a first work function in a central region and forming a second type of metal with a second work function in at least one edge region adjacent the central region. The first work-function is different from the second work function.
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申请公布号 |
US2010041225(A1) |
申请公布日期 |
2010.02.18 |
申请号 |
US20080192491 |
申请日期 |
2008.08.15 |
申请人 |
ANDERSON BRENT A;NOWAK EDWARD J |
发明人 |
ANDERSON BRENT A.;NOWAK EDWARD J. |
分类号 |
H01L21/4763 |
主分类号 |
H01L21/4763 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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