发明名称 |
STABLE, HIGH RATE SILICON SLURRY |
摘要 |
The invention provides a chemical mechanical polishing composition comprising wet process silica, a stabilizer compound, a potassium salt, a secondary amine compound, and water. The invention further provides a method of polishing a substrate with the polishing composition. |
申请公布号 |
WO2009142692(A3) |
申请公布日期 |
2010.02.18 |
申请号 |
WO2009US02846 |
申请日期 |
2009.05.07 |
申请人 |
CABOT MICROELECTRONICS CORPORATION |
发明人 |
WHITE, MICHAEL;GILLILAND, JEFFREY;JONES, LAMON;WALTERS, ALICIA |
分类号 |
C09K3/14 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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