| 摘要 |
PROBLEM TO BE SOLVED: To prevent a floating quantity from a reference plane of a surface plate of a baseplate mounted with a Z table from changing by influence of disturbance such as a pressure change in compressed air and external force acting on the baseplate, without expanding device dimensions. SOLUTION: In this three-dimensional positioning device 10, a plurality of coil springs 150 energize a guide plate 78 to the reference plane 14 side of the surface plate 12 by anti-floating force F smaller than floating force generated in the guide plate 78 by the compressed air supplied via a static pressure pad 130. Thus, a floating quantity R of the guide plate 78 from the reference plane 14 of the surface plate 12 is reduced in response to the size of the anti-floating force F as compared with a case of not making the anti-floating force F act on the guide plates 78, and an air layer (an air bearing) formed between the guide plate 78 and the reference plane 14 is compressed in the Z axis direction, and rigidity can be enhanced in the Z axis direction of this air bearing. COPYRIGHT: (C)2010,JPO&INPIT
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