MANUFACTURING PROCESS OF STAMPER FOR NANOIMPRINT

摘要

<P>PROBLEM TO BE SOLVED: To generate no burr on a cut surface of a stamper in stamper-punching processing. Ž<P>SOLUTION: After a stamper master 12 is mounted to a cutting part 20B of a fixed-side punching die 20 through an underlay member 10, the stamper master 12 in a state of being pressed by an extrusion plate 14 is sheared together with the underlay member 10 by a cutting part 18E of a movable-side punching die 18. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž