| 摘要 |
Provided is a vertical heat treatment apparatus such that, with a vertical heat treatment furnace having at least a reaction tube, a heat treatment boat for holding substrates, a heater for heating the substrates, a gas introduction pipe for introducing an atmospheric gas into the reaction tube, a gas supply pipe connected with the gas introduction pipe, and a gas port formed in a flange body provided at the bottom of the reaction tube or in the reaction tube and into which the gas introduction pipe is inserted, connection of the gas introduction pipe and the gas supply pipe is accomplished with a joint on the outside of the reaction tube. The joint has a short metal tube having at least a flange section, the flange section of the short metal tube is connected with a flange section provided for the gas port with an intervening O ring, and the gas introduction tube is inserted into the through-hole so formed and is connected with the gas supply pipe by the joint. Thus no fogging of the substrates occurs, breakage of the gas introduction pipe can be prevented, and the gas introduction pipe can easily be connected with the gas supply pipe. |
