发明名称 METHOD OF FORMING A SINGLE METAL THAT PERFORMS N WORK FUNCTION AND P WORK FUNCTION IN A HIGH-K/METAL GATE PROCESS
摘要 The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a gate dielectric over a semiconductor substrate, forming a capping layer over or under the gate dielectric, forming a metal layer over the capping layer, the metal layer having a first work function, treating a portion of the metal layer such that a work function of the portion of the metal layer changes from the first work function to a second work function, and forming a first metal gate from the untreated portion of the metal layer having the first work function and forming a second metal gate from the treated portion of the metal layer having the second work function.
申请公布号 US2010038721(A1) 申请公布日期 2010.02.18
申请号 US20090492889 申请日期 2009.06.26
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIN YIH-ANN;CHEN RYAN CHIA-JEN;CHAO DONALD Y.;MOR YI-SHIEN;HUANG KUO-TAI
分类号 H01L27/092;H01L21/28 主分类号 H01L27/092
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