DEFORMABLE MIRROR, MIRROR APPARATUS, AND EXPOSURE APPARATUS

摘要

A mirror apparatus 70 includes a plurality of holes 35c which are divided by partition wall portions 35d on a back surface of a mirror M1, a plurality of thin film piezoelectric elements 41 which are fixed to bottom surfaces of the plurality of holes 35c respectively, a radiation temperature-regulating plate 36 which has a plurality of projections 36a inserted into the holes 35c, and a mirror control system 40 which individually controls voltages to be applied to the plurality of thin film piezoelectric elements 41 to deform the mirror M1. The mirror can be efficiently deformed and/or cooled from the side of the back surface without transmitting any vibration to the mirror.