发明名称 |
STEREOSCOPIC THREE-DIMENSIONAL MEASUREMENT SYSTEM AND METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a preferable stereoscopic three-dimensional optical measurement system and a method. <P>SOLUTION: A stereoscopic three-dimensional optical measurement system (100) and a method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust relating to surface contour discontinuities. A test article (120) can be imaged from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199) so that cameras (111, 112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position. <P>COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2010038923(A) |
申请公布日期 |
2010.02.18 |
申请号 |
JP20090213805 |
申请日期 |
2009.09.15 |
申请人 |
RUDOLPH TECHNOLOGIES INC |
发明人 |
SNOW DONALD B;STROM JOHN T;KRAFT RAYMOND H |
分类号 |
G01B11/00;G01B11/03;G01B11/245;G01B11/25;G01C11/06;H01L21/66;H05K13/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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