发明名称 STEREOSCOPIC THREE-DIMENSIONAL MEASUREMENT SYSTEM AND METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a preferable stereoscopic three-dimensional optical measurement system and a method. <P>SOLUTION: A stereoscopic three-dimensional optical measurement system (100) and a method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust relating to surface contour discontinuities. A test article (120) can be imaged from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199) so that cameras (111, 112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010038923(A) 申请公布日期 2010.02.18
申请号 JP20090213805 申请日期 2009.09.15
申请人 RUDOLPH TECHNOLOGIES INC 发明人 SNOW DONALD B;STROM JOHN T;KRAFT RAYMOND H
分类号 G01B11/00;G01B11/03;G01B11/245;G01B11/25;G01C11/06;H01L21/66;H05K13/00 主分类号 G01B11/00
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