发明名称 CERIUM CARBONATE POWDER, CERIUM OXIDE POWDER, METHOD FOR PREPARING THE SAME, AND CMP SLURRY COMPRISING THE SAME
摘要 Disclosed is a method of preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution and subjecting the mixture solution to a precipitation reaction, wherein the concentration of cerium in the cerium precursor solution ranges from IM to 1OM, the molar concentration ratio of the cerium precursor to the carbonate precursor ranges from 1:1 to 1:7, and the cerium precursor solution contains at least one additive selected from the group consisting of carbonate compounds, acrylic compounds, and sulfate ion-containing compounds. According to the disclosed invention, cerium carbonate powder having a uniform particle size of 0.05 to 1ú can be prepared through a liquid-phase process by controlling the concentration of the cerium precursor solution, the molar concentration ratio of the cerium precursor to the carbonate precursor solution, the kind of additives, and the like. Also, the cerium carbonate powder is enabled to have a uniform shape with an aspect ratio of 1 to 5, even though it has an orthorhombic crystal structure.
申请公布号 WO2007055523(A9) 申请公布日期 2010.02.18
申请号 WO2006KR04686 申请日期 2006.11.10
申请人 LG CHEM, LTD. 发明人 OH, MYOUNG-HWAN;NHO, JUN-SEOK;KIM, JONG-PIL;KIM, JANG-YUL;CHO, SEUNG-BEOM
分类号 C01F17/00 主分类号 C01F17/00
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