| 摘要 |
PROBLEM TO BE SOLVED: To provide a chip storage tray capable of preventing an attachment of a miniaturized semiconductor chip to the recessed bottom of the chip storage tray to facilitate removing the chip from the tray, preventing the cracks and the defects of the semiconductor chip. SOLUTION: The chip storage tray includes: a tray body 1 which stores the semiconductor chip 9 in a removable manner and has the recess 3 used as a plurality of storage pockets; and a thin film 2 composed of a parting material formed on the surface of the tray body 1 including the storage pocket 3. The surface of the parting-material thin film 2 can be formed in an irregular shape by etching, blast processing or the like. The tray body 1 is immersed in the solution of the parting material having a high parting performance, then the tray body 1 is removed from the solution, and the parting material adhered to the surface of the removed tray body 1 is dried to form the parting-material thin film 2 on the surface of the tray body 1. COPYRIGHT: (C)2010,JPO&INPIT |
