| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and multifunctional light sensor suppressing leak current between elements adjacent to each other on the same substrate, and including both an ultraviolet light sensor and a visible light sensor. SOLUTION: This light sensor includes an SOI substrate 12 with a silicon oxide insulation film 16 and a silicon semiconductor layer 18 made of single-crystal silicon formed on a silicon substrate 14. Photodiodes PD1 and PD2 are formed on the silicon substrate 14, and a photodiode UV-PD and a main part (source-drain channel region) of an MOSFET constituting a control circuit 11A are formed in the silicon semiconductor layer 18 on the insulation film 16. COPYRIGHT: (C)2010,JPO&INPIT |
