| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact sensor for vacuum in a simple structure for setting a wide detection range, reducing a dead angle, and also reducing the weight of an approach sensing portion. Ž<P>SOLUTION: In the approach sensing portion 10, flexible first and second conductive thin plates 11 and 12 conductive with each other when they are in contact with or close to each other, are curved in an arch shape to be separated from each other in an inside/outside direction. The sensing portion 10 covers all the region of a tip surface portion of a manipulator 3. Before the manipulator 3 collides with another object, the approach sensing portion 10 abuts against the other object and is deformed, and a conduction detection circuit portion 20 detects the electrical conduction of the first and second conductive thin plates 11 and 12 by contact or coming close to each other, to detect the approach of the manipulator 3 to the other object. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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