发明名称 |
COMPUTATION EFFICIENCY BY DIFFRACTION ORDER TRUNCATION |
摘要 |
A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set of diffraction orders for a three-dimensional structure. The diffraction orders within the set of diffraction orders are then prioritized. The set of diffraction orders is truncated to provide a truncated set of diffraction orders based on the prioritizing. Finally, a simulated spectrum is provided based on the truncated set of diffraction orders.
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申请公布号 |
US2010042388(A1) |
申请公布日期 |
2010.02.18 |
申请号 |
US20080193341 |
申请日期 |
2008.08.18 |
申请人 |
BISCHOFF JOERG;LI SHIFANG;YANG WEIDONG;CHU HANYOU |
发明人 |
BISCHOFF JOERG;LI SHIFANG;YANG WEIDONG;CHU HANYOU |
分类号 |
G06G7/62 |
主分类号 |
G06G7/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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