发明名称 CMOS image sensor, method of making the same, and method of suppressing dark leakage and crosstalk for CMOS image sensor
摘要 A CMOS image sensor, in which an implantation process is performed on substrate under isolation structures each disposed between two adjacent photosensor cell structures. The implantation process is a destructive implantation to form lattice effects/trap centers. No defect repair process is carried out after the implantation process is performed. The implants can reside at the isolation structures or in the substrate under the isolation structures. Dark leakage and crosstalk are thus suppressed.
申请公布号 US2010038688(A1) 申请公布日期 2010.02.18
申请号 US20080189815 申请日期 2008.08.12
申请人 WU HSIN-PING 发明人 WU HSIN-PING
分类号 H01L27/146;H01L31/18 主分类号 H01L27/146
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