| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device can sufficiently suppress distortion and deformation of a treated object. SOLUTION: This heat treatment device comprises a cooling chamber 160 for cooling the heated treated object M. The cooling chamber is provided with cooling units CU respectively comprising a conveying device 10 for simultaneously conveying the plurality of treated objects in a single line, a mist cooling device 30 disposed in a state of surrounding a conveying passage of the conveying device and supplying misty cooling liquid, and a gas cooling device 20 disposed in a state of surrounding the conveying passage of the conveying device and supplying a cooling gas. COPYRIGHT: (C)2010,JPO&INPIT
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