发明名称 |
GAS GAUGE COMPATIBLE WITH VACUUM ENVIRONMENTS |
摘要 |
A gas gauge (100) is provided for use in a vacuum environment having a measurement gas flow channel (105). The gas gauge comprises a measurement nozzle (110) in the measurement gas flow channel (105). The measurement nozzle (110) is configured to operate at a sonically choked flow condition of a volumetric flow being sourced from a gas supply (120) coupled to the measurement gas flow channel (105). The gas gauge (100) further comprises a pressure sensor (127) operatively coupled to the measurement gas flow channel (105) downstream from the sonically choked flow condition of the volumetric flow to measure a differential pressure of the volumetric flow for providing an indication of a gap (130) between a distal end of the measurement nozzle (135) and a target surface (140) proximal thereto. |
申请公布号 |
WO2009103485(A3) |
申请公布日期 |
2010.02.18 |
申请号 |
WO2009EP01101 |
申请日期 |
2009.02.17 |
申请人 |
ASML HOLDING N.V.;SCHULTZ, GEOFFREY, ALAN |
发明人 |
SCHULTZ, GEOFFREY, ALAN |
分类号 |
G01B13/12;G03F7/20 |
主分类号 |
G01B13/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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